• 专利标题:   Method for forming semiconductor structure, involves first graphene layer formed on top surface of metal layer, medium layer formed on first graphene layer, and metal layer formed on top surface of second graphene layer.
  • 专利号:   CN106409755-A, CN106409755-B
  • 发明人:   ZHANG H, ZHANG C
  • 专利权人:   SEMICONDUCTOR MFG INT SHANGHAI CORP, SEMICONDUCTOR MFG INT BEIJING CORP
  • 国际专利分类:   H01L021/768, H01L023/532
  • 专利详细信息:   CN106409755-A 15 Feb 2017 H01L-021/768 201716 Pages: 20 Chinese
  • 申请详细信息:   CN106409755-A CN10465541 31 Jul 2015
  • 优先权号:   CN10465541

▎ 摘  要

NOVELTY - The method involves forming a dielectric layer on a surface of a substrate. The dielectric layer is patterned to form an opening. A top surface of the dielectric layer is covered with a first metal layer and a second metal layer. A first graphene layer is formed on a top surface of the second metal layer. A medium layer is formed on the first graphene layer. A second metal layer is formed on a top surface of a second graphene layer, where thickness of the first graphene layer is measured about 1-100 angstroms. The first metal layer is made of copper. USE - Method for forming a semiconductor structure. ADVANTAGE - The method enables reducing the resistance of the semiconductor structure and improving electrical performance of the semiconductor structure. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a semiconductor structure. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a semiconductor structure.