• 专利标题:   Graphene film deposition device has heat conducting rod whose top end is provided with telescopic end, and bottom end is set with heat conducting plate.
  • 专利号:   CN106480423-A, CN106480423-B
  • 发明人:   LI S
  • 专利权人:   YANTAI SINAGRAPHENE CO LTD, SHANDONG CELTIG NEW MATERIAL CO LTD
  • 国际专利分类:   C23C016/26, C23C016/50
  • 专利详细信息:   CN106480423-A 08 Mar 2017 C23C-016/26 201722 Pages: 11 Chinese
  • 申请详细信息:   CN106480423-A CN10941638 31 Oct 2016
  • 优先权号:   CN10941638

▎ 摘  要

NOVELTY - The device has a pre heater (21) which is arranged on an air supply pipe (11). A first air supply branch (13) is connected to a first air hole (5). A second air supply branch (14) is connected to a second air hole. The second air supply branch is made to run through a first vacuum chamber. The second air supply branch is contacted with a heating rod. The second air supply branch is connected with several heat conducting rods. A top end of the heat conducting rod is provided with a telescopic end and the bottom end is set with a heat conducting plate. USE - Graphene film deposition device. ADVANTAGE - The product yield of graphene is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for depositing graphene film. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of the graphene film deposition device. Air hole (5) Air supply pipe (11) Air supply branches (13,14) Pre-heater (21) Circular bead (28)