▎ 摘 要
NOVELTY - Controllable multifunctional broadband terahertz wave polarization conversion metamaterial comprises gold (1) and graphene (2), where the gold and graphene form a square ring. The side view structural materials of the unit structure are respectively gold, Neltec NY9208, indium:indium oxide, silicon dioxide and gold-graphene square ring from bottom to top. The graphene is immersed in the conductive ion glue, and the ion glue and indium:indium oxide are respectively used as electrodes to connect to the external voltage. USE - Controllable multifunctional broadband terahertz wave polarization conversion metamaterial. ADVANTAGE - The working band and the polarization conversion function of the material can be controlled by external voltage. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing a controllable multifunctional broadband terahertz wave polarization conversion metamaterial, which involves: (A) using electron beam evaporation technology to deposit gold film on the back of Neltec NY9208 substrate, using atomic layer deposition technology and electron beam evaporation technology to deposit indium:indium oxide and silicon dioxide films on the front surface of Neltec NY9208 respectively; (B) growing single-layer graphene by chemical vapor deposition technology and transferring to the silicon dioxide layer, spin-coating polymethyl methacrylate on the graphene as an electron beam resist, and using electron beam etching technology patterning into a pattern corresponding to the graphene structure, corroding exposed area by oxygen plasma, and dissolving polymethyl methacrylate in acetone to obtain the graphene structure and passing complementary metal structure through the standard photolithography process to fulfill; and (C) spin-coating ion glue on the structure, and connecting ion glue layer and the indium:indium oxide layer to the positive and negative electrodes of the power supply. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of a controllable multifunctional broadband terahertz wave polarization conversion metamaterial. Gold (1) Graphene (2)