▎ 摘 要
NOVELTY - The filter has a strip-shaped light waveguide (2) embedded with a first graphene layer (41). The first graphene layer is fixed on the strip-shaped light waveguide that is periodically arranged in an interdigital structure. A second graphene layer (42) is extended to an upper surface of a U-shaped substrate. The first graphene layer is formed on the second graphene layer. An isolation dielectric layer is formed between the first graphene layer and the strip-shaped light waveguide. Each graphene layer is provided with an electrode that is formed with a voltage loop for applying voltage. USE - Graphene-silicon waveguide based tunable light filter. ADVANTAGE - The filter can improve narrow tuning range, and has high tuning speed, and reduces structure size integration difficulty based on graphene electrically adjustable characteristics and realizes flexible waveguide transmission control process by external voltage. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene-silicon waveguide based tunable light filter. Strip-shaped light waveguide (2) Cladding layers (31, 32) Graphene layers (41, 42) Isolation dielectric layers (51, 52) Electrodes (61, 62)