▎ 摘 要
NOVELTY - This utility model new supply of chemistry gas phase deposition production of tail gas comprehensive treatment device of graphene process, including CVD tubular furnace, shunting device, used for tail gas pressure state under different production the production of graphene and shunting, condensing device, tail gas and can filter used for condensing the condensed gas, storage device, used for not can condensate storage and energy conversion device is gas, and the tail gas can fuel for the gas and power can use the conversion tail gas in the CVD tubular furnace one terminal and shunting device one end through pipeline connected with, the other end shunting device and the condensing device connected with, the other end condensing device and storage device is connected, the other end storage device and one end of energy conversion device is connected, energy conversion device the other end and auxiliary power source the CVD tubular furnace connection. The device strong practicability, high safety, at last using chemistry can the tail gas conversion for power supply assistant power source using the tubular furnace, realize circulation of tail gas again using, reasonable solves tail gas problem, reducing of environment pollute.