• 专利标题:   Method for manufacturing graphene alkenyl electronic field-effect device e.g. complementary metal oxide semiconductor (CMOS) device, involves exposing out portion of gate electrode to form source and drain electrodes.
  • 专利号:   CN102915929-A, CN102915929-B
  • 发明人:   CHEN Z, LIU X, WANG H, XIE H, XIE X, YU G, ZHANG Y
  • 专利权人:   CHINESE ACAD SCI SHANGHAI INST MICROSYST, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/28, H01L021/336, H01L021/8232
  • 专利详细信息:   CN102915929-A 06 Feb 2013 H01L-021/336 201347 Pages: 11 Chinese
  • 申请详细信息:   CN102915929-A CN10425691 30 Oct 2012
  • 优先权号:   CN10425691

▎ 摘  要

NOVELTY - The method involves providing a semiconductor substrate (1). A gate electrode is formed on the semiconductor substrate. A gate dielectric layer is formed by depositing a high-k dielectric constant of gate dielectric material. The gate dielectric layer is etched to form the needed pattern. The portion of gate electrode is exposed. A graphene (3) is etched to form preset pattern. The portion of gate electrode is exposed out to form source and drain electrodes (5,6). USE - Method for manufacturing graphene alkenyl electronic field-effect device e.g. CMOS device, and large-scale carbon-based integrated circuit. ADVANTAGE - The device can be manufactured simply. The performance of field-effect device can be improved. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view illustrating the process for manufacturing graphene alkenyl electronic field-effect device. Semiconductor substrate (1) Double grid electrode (2) Graphene (3) Source electrode (5) Drain electrode (6)