• 专利标题:   Production of doped graphene pattern during manufacture of pn-diode, involves supplying n-type carbon precursor on substrate, forming amorphous carbon pattern by irradiating electron beam or ion beam to precursor and heat-treating.
  • 专利号:   KR2015106038-A, KR1563806-B1
  • 发明人:   BAE D J, KIM K S, LEE I B
  • 专利权人:   UNIV SEJONG IND ACAD COOP FOUND
  • 国际专利分类:   B01J019/08, C23C016/26, C01B031/02
  • 专利详细信息:   KR2015106038-A 21 Sep 2015 201575 Pages: 12
  • 申请详细信息:   KR2015106038-A KR027921 10 Mar 2014
  • 优先权号:   KR027921

▎ 摘  要

NOVELTY - Production of doped graphene pattern involves supplying a n-type carbon precursor on a substrate, forming an amorphous carbon pattern by irradiating electron beam or ion beam to carbon precursor, and heat-treating the amorphous carbon pattern. USE - Production of doped graphene pattern during manufacture of pn-diode (claimed). ADVANTAGE - The method economically forms doped graphene pattern. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for production of pn-diode.