• 专利标题:   Plasma assisted induction heating device used for graphene preparation comprises machine frame, microwave source, coupled cavity, vacuum chamber, induction coil, and workpiece frame wound with induction coil.
  • 专利号:   CN205368492-U
  • 发明人:   QU H
  • 专利权人:   SHENYANG KEYOU VACUUM CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN205368492-U 06 Jul 2016 C23C-016/26 201657 Pages: 5 Chinese
  • 申请详细信息:   CN205368492-U CN20094752 01 Feb 2016
  • 优先权号:   CN20094752

▎ 摘  要

NOVELTY - This new utility model providing one plasma auxiliary induction heating method of preparing graphite alkene and device, relating to a kind of graphite alkene is one in device technology area. This new utility model comprises machine frame, microwave source, coupled cavity, vacuum chamber, induction coil and workpiece frame, microwave source located on upper part of machine frame, coupling cavity is set with microwave source on the left side, bottom end coupling cavity is set with vacuum chamber, vacuum chamber set up on machine frame above, in vacuum chamber set with workpiece frame, workpiece frame around the wound with induction coil. This new utility model and in chemistry gas phase deposition process, by induction coil heating processing part, and using microwave producing plasma by heat and ion bombardment can effect the same energy, using reaction gas generate chemistry reaction, preparing graphene material.