▎ 摘　　要

NOVELTY - The plate has graphite and/or graphene derivate middle layer (3) which is formed between upper magnetic film layer (2) and lower magnetic film layer (1) to form laminated sandwich structure. An encapsulation structure is formed between lower magnetic film layer and graphite derivate intermediate layer. The magnetic film layer is independently selected from polyimide film. The soft magnetic metal powder is selected from group consisting of iron, cobalt and nickel. USE - Ultra high-resolution fine metal mask plate. ADVANTAGE - The upper and lower magnetic film layer and graphene and/or graphene derivate middle layer are provided to form mask plate, so that production of finer via is enabled, through-hole density per unit area is improved, and deposition mask resolution is increased. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the ultra high-resolution fine metal mask plate. Upper magnetic film layer (1) Lower magnetic film layer (2) Graphite and/or graphene derivate middle layer (3)