• 专利标题:   Industrial graphene thin film patterning method, involves transmitting UV radiation in ozone environment through mask plate during graphene thin film patterning process, and fixing graphene thin film with substrate.
  • 专利号:   CN104051239-A
  • 发明人:   SHI H, ZHANG W, ZHONG D, PAN H, YU C, CUI H
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   G03F007/42, H01L021/02
  • 专利详细信息:   CN104051239-A 17 Sep 2014 H01L-021/02 201482 Pages: 7 Chinese
  • 申请详细信息:   CN104051239-A CN10298301 26 Jun 2014
  • 优先权号:   CN10298301

▎ 摘  要

NOVELTY - The method involves transmitting UV radiation in ozone environment through a mask plate during graphene thin film patterning process. A graphene thin film is prepared. The prepared graphene thin film is fixed with a substrate. Graphene mask plate manufacturing process is performed. A graphene mask plate and the graphene thin film are placed in the ozone environment. The graphene thin film is connected with a metal film. A metal thin film is fixed to a copper foil and an aluminum foil or nickel foil. The graphene mask plate is formed as a quartz glass mask plate or hollow tin paper mask plate. USE - Industrial graphene thin film patterning method. ADVANTAGE - The method enables reducing patterning cost, and improving processing efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating an industrial graphene thin film patterning method.'(Drawing includes non-English language text)'