• 专利标题:   Preparing fullerene-like carbon layer/graphene-like boron nitride multilayer composite super-lubricating film involves cleaning ultrasonically substrate in absence of water ethanol and acetone, bombarding argon plasma on substrate.
  • 专利号:   CN108203810-A, WO2019119647-A1
  • 发明人:   GAO K, GAO B, ZHANG J, ZHANG B, WANG Y, QIANG L
  • 专利权人:   LANZHOU CHEM PHYSICS INST CHINESE ACAD, LANZHOU CHEM PHYSICS INST CHINESE ACAD
  • 国际专利分类:   C23C014/06, C23C014/35, C23C016/26, C23C028/00
  • 专利详细信息:   CN108203810-A 26 Jun 2018 C23C-014/35 201848 Pages: 6 Chinese
  • 申请详细信息:   CN108203810-A CN11382569 20 Dec 2017
  • 优先权号:   CN11382569

▎ 摘  要

NOVELTY - Preparing a fullerene-like carbon layer/graphene-like boron nitride multilayer composite super-lubricating film involves cleaning ultrasonically substrate in the absence of water ethanol and acetone for 15-30 minutes, cleaning substrate through argon plasma bombardment for 15 minutes, preparing a fullerene-like carbon layer A having an onion-like structure by high vacuum medium frequency magnetron sputtering, preparing a graphene-like boron nitride layer B by sputtering a simple boron target with a high vacuum medium frequency magnetron sputtering coating device, preparing a fullerene-like carbon layer A and preparing a graphene-like boron nitride layer B repeatedly and obtaining a multilayer composite film by superposition deposition in the order of ABABABA over 60-80 cycles. USE - Method used for preparing a fullerene-like carbon layer/graphene-like boron nitride multilayer composite super-lubricating film. ADVANTAGE - The method enables to complement the length, obtain a high-performance film with high load-bearing, abrasion resistance, high temperature resistance and ultra-lubrication.