• 专利标题:   Method for promoting secondary growth of graphene, comprises using confinement space formed by metal as growth substrate graphene annealing, etching outer surface of confinement space, and performing second growth graphene.
  • 专利号:   CN115806288-A
  • 发明人:   ZHANG H, HAO Y
  • 专利权人:   UNIV NANJING
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN115806288-A 17 Mar 2023 C01B-032/186 202327 Chinese
  • 申请详细信息:   CN115806288-A CN11634985 19 Dec 2022
  • 优先权号:   CN11634985

▎ 摘  要

NOVELTY - Method for promoting secondary growth of graphene involves using a confinement space formed by metal as growth substrate graphene annealing, etching an outer surface of a confinement space after the first growth graphene is finished, and performing second growth graphene to promote the inner surface of the confinement space to grow double-layer graphene. The metal is chosen from copper or nickel. The annealing atmosphere is argon gas and hydrogen. USE - The method is useful for promoting secondary growth of graphene and application in preparing double-layer graphene used in graphene-based electronic device and can also be used in semiconductor device. ADVANTAGE - The method obtains double-layer graphene in the relatively stable confinement space, and obtains the high quality, high coverage of double layer graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of double-layer graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic flow diagram of the method for promoting the secondary growth of graphene (Drawing includes non-English language text).