• 专利标题:   Method for detecting graphene piezoresistive factor, involves applying load to middle unit of rectangular beam to generate upward or downward bending deformation, and measuring resistance change of graphene and strain sheet.
  • 专利号:   CN112816780-A
  • 发明人:   ZHENG X, GU Z
  • 专利权人:   HUAIYIN TECHNOLOGY INST
  • 国际专利分类:   G01R027/02
  • 专利详细信息:   CN112816780-A 18 May 2021 G01R-027/02 202153 Pages: 6 Chinese
  • 申请详细信息:   CN112816780-A CN10125025 29 Jan 2021
  • 优先权号:   CN10125025

▎ 摘  要

NOVELTY - The method involves taking a silicon dioxide/silicon wafer as a bearing substrate of graphene, and depositing the graphene on the substrate. A titanium/gold detecting electrode is prepared on a surface of the graphene. A strain sheet structure is made as a reference electrode on the surface of the substrate. A silicon dioxide silicon sheet with the detection electrode and the reference electrode is adhered to a middle portion of a rectangular beam upper end. A universal meter is utilized for detecting change of a graphene resistance and a resistance change of the reference electrode. USE - Method for detecting graphene piezoresistive factor. ADVANTAGE - The method enables detecting the graphene piezoresistive factor with high accuracy.