▎ 摘 要
NOVELTY - The circuit (30) has a first semiconductor integrated circuit tier including a first component vertically positioned relative to a second semiconductor integrated circuit tier with a second component. A graphene layer (38) is formed between the first and second semiconductor integrated circuit tiers such that the graphene layer is not a part of the first or second component. The graphene layer is coupled to ground and provided with an electromagnetic shielding between the first and second semiconductor integrated circuit tiers. The graphene layer defines an aperture (42). USE - Monolithic 3D integrated circuit for use in an electronic device e.g. set top box, entertainment unit, navigation device, fixed location data unit, mobile location data unit, mobile phone, cellular phone, computer, portable computer, desktop computer, personal digital assistant (PDA), monitor, computer monitor, TV, tuner, radio, satellite radio, music player, digital music player, portable music player, digital video player, video player, DVD player and portable digital video player (all claimed). ADVANTAGE - The graphene layer provides an electromagnetic interference (EMI) shield between the adjacent tiers or layers in the circuit so as to reduce crosstalk between the tiers, thus eliminating negative impact performance of the circuit in a cost-effective manner with reduced power consumption. DETAILED DESCRIPTION - The graphene layer is a sheet like layer. The first and second components are electronic components (34, 52) i.e. transistors. An INDEPENDENT CLAIM is also included for a method for forming a monolithic three-dimensional (3D) integrated circuit. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a completed monolithic 3D integrated circuit including a graphene shield. Monolithic 3D integrated circuits (30, 54) Electronic components (34, 52) Graphene layer (38) Aperture (42) Inter-tier connect vias (58)