▎ 摘　　要

NOVELTY - Controlling stress of amorphous carbon film, comprises (a) preparing a substrate, (b) depositing a first amorphous carbon layer on the substrate, (c) stacking a graphene layer on the first amorphous carbon layer, and (d) depositing a second amorphous carbon layer on the graphene layer and the first amorphous carbon layer, where the stress of the amorphous carbon film composed of the first amorphous carbon layer, the graphene layer, and the second amorphous carbon layer is physically controlled, as the step (c) is performed. USE - The method is useful for controlling stress of amorphous carbon film. ADVANTAGE - The method can be used graphene layer composed of clusters having relatively high strength and toughness without changing the process by applying single layer or multiple layers between first and second amorphous carbon layers, shorten process time, and reduces cost of the process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for amorphous carbon film whose stress is controlled by the stress control method. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for controlling stress of amorphous carbon film (Drawing includes non-English language text).