• 专利标题:   Method of growing graphene on silicon substrate by using silicon carbide substrate chip, putting into graphite crucible, adding carbon or silicon, covering, heating, carrying out hydrogen corrosion, and forming silicon carbide structure.
  • 专利号:   CN105951179-A, CN105951179-B
  • 发明人:   CHEN X, XU X, ZHAG F, ZHAO X, ZHANG F
  • 专利权人:   UNIV SHANDONG, UNIV SHANDONG
  • 国际专利分类:   C23C016/26, C30B025/18, C30B029/02
  • 专利详细信息:   CN105951179-A 21 Sep 2016 C30B-025/18 201673 Pages: 11 Chinese
  • 申请详细信息:   CN105951179-A CN10273844 28 Apr 2016
  • 优先权号:   CN10273844

▎ 摘  要

NOVELTY - A method of growing graphene on silicon substrate comprises using silicon carbide substrate chip and putting into graphite crucible, adding carbon or silicon, covering, heating at 1450-1750 degrees C in highly pure hydrogen gas, and carrying out hydrogen corrosion; and forming silicon carbide structure, introducing argon gas, increasing furnace temperature to 1500-1800 degrees C, keeping temperature for 60-90 minutes, and growing graphene. USE - Method of growing graphene on silicon substrate. ADVANTAGE - The method regulates high frequency radio frequency. DESCRIPTION OF DRAWING(S) - The drawing is a schematic diagram illustrating a method of growing graphene on silicon substrate.