▎ 摘　　要

NOVELTY - The plug has a target substrate whose surface is provided with a dielectric layer. The dielectric layer is provided with an auxiliary metal column. A side wall of the auxiliary metal column is coated with a graphene thin film. The auxiliary metal column is made of a cobalt, molybdenum, iridium or ruthenium material. USE - Graphene conductive plug. ADVANTAGE - The plug adopts a self-aligned technique to form auxiliary metal column that is etched with a metal layer to avoid hole formation, so that electrical performance of the plug is prevented from being affected. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene conductive plug manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a side sectional view of a graphene conductive plug.