▎ 摘　　要

NOVELTY - The apparatus has a heating unit (200) that heats up the operation gas fed to a hypersonic injection nozzle (100) which sprays operation gas to a substrate (S). A solution supply unit (300) stores the mixture of graphene particle (P1) and volatile liquid (P2), and connects to the hypersonic injection nozzle, so that mixture is emitted through hypersonic injection nozzle with operation gas. The mixture of graphene particle and volatile liquid is steamed and emitted in fine particle liquid droplet state through the hypersonic injection nozzle, and is coated on deposition substrate. USE - Low temperature spray type graphene deposition apparatus used for deposition of graphene particle on substrate such as conductive substrate, and transparent or flexible display substrate of electronic apparatus. ADVANTAGE - Graphene particles can be easily deposited and coated on substrate susceptible to high heat through supersonic spray nozzle in a relatively low temperature state, without performing complex manufacturing process including chemical deposition process and separate etching and transcription process. The graphene evaporation coating with excellent permeability and surface resistance property can be obtained. The high quality coating layer can be obtained. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the configuration of hot plate and laser irradiator equipped in low temperature spray type graphene deposition apparatus. (Drawing includes non-English language text) Hypersonic injection nozzle (100) Heating unit (200) Solution supply unit (300) Graphene particle (P1) Volatile liquid (P2) Substrate (S)