• 专利标题:   Indoor humidity sensor, has sensing unit fixed on signal processing unit, grid electrode arranged on sensing unit, insulating layer formed on grid electrode, and sensing unit electrically connected with signal processing unit through lead.
  • 专利号:   CN115508419-A
  • 发明人:   WANG C
  • 专利权人:   QINGDAO GOERTEK INTELLIGENT SENSOR CO
  • 国际专利分类:   G01N027/22
  • 专利详细信息:   CN115508419-A 23 Dec 2022 G01N-027/22 202304 Chinese
  • 申请详细信息:   CN115508419-A CN11186693 27 Sep 2022
  • 优先权号:   CN11186693

▎ 摘  要

NOVELTY - The sensor has a sensing unit fixed on a signal processing unit. A grid electrode is arranged on the sensing unit. An insulating layer is formed on the grid electrode. A graphene quantum dot layer is formed on the insulating layer. A drain electrode and a source electrode are arranged on the graphene quantum dot layer. Components of the graphene quantum dot layer are provided with graphene quantum dots and zinc nitrate mixed according to preset proportion. The signal processing unit is a silicon substrate. The insulating layer is a silicon dioxide layer. The sensing unit is electrically connected with the signal processing unit through a lead. USE - Indoor humidity sensor. ADVANTAGE - The sensor is easy to overshoot control humidity, and has accurate response, and improves humidity sensor response speed. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an indoor humidity sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of an indoor humidity sensor. 2Induction unit 8Gate