• 专利标题:   Self-filtering visible-blind silicon compatible infrared photodetector has top electrode that is formed ohmic contact with single crystal silicon substrate, and bottom electrode that is formed ohmic contact with graphene film.
  • 专利号:   CN112002784-A
  • 发明人:   YU Y, XIA Y, ZHANG H, ZHANG T, XU G, CHEN S, MA Y
  • 专利权人:   UNIV HEFEI TECHNOLOGY
  • 国际专利分类:   H01L031/028, H01L031/0352, H01L031/108
  • 专利详细信息:   CN112002784-A 27 Nov 2020 H01L-031/108 202002 Pages: 8 Chinese
  • 申请详细信息:   CN112002784-A CN10941530 09 Sep 2020
  • 优先权号:   CN10941530

▎ 摘  要

NOVELTY - The photodetector has a single crystal silicon substrate whose upper surface is etched into a silicon microhole array structure. A layer of graphene film (3) is transferred on the lower surface of a single crystal silicon substrate (2). A silicon-graphene Schottky junction is formed. A quantum dot layer (4) is provided on the lower surface of a graphene film. A top electrode (1) is provided on the upper surface of the single crystal silicon substrate. A bottom electrode (5) is provided on the lower surface of the graphene film. The top electrode is formed an ohmic contact with the single crystal silicon substrate. The bottom electrode is formed an ohmic contact with the graphene film. USE - Self-filtering visible-blind silicon compatible infrared photodetector. ADVANTAGE - The photodetector is provided with the self-driving, visible light blindness, near-infrared narrowband response, fast response speed and is provided with the strong compatibility, high stability, easy preparation, and low cost. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the photodetector. Top electrode (1) Single crystal silicon substrate (2) Layer of graphene film (3) Quantum dot layer (4) Bottom electrode (5)