▎ 摘　　要

NOVELTY - The gyroscope has an electrode assembly formed on a substrate, where a graphene layer is coated on surfaces of a resonant structure and the electrode assembly. The resonant structure comprises multiple suspension beam structures and a vibration ring. The electrode assembly comprises a first group of electrodes and a second group of electrodes, where the vibrating ring is arranged between the first group of electrodes and the second group of electrodes. A second gap is formed between the second group of electrode and the vibration ring, where the vibration ring is connected with a supporting anchor point through the suspension beam structures. USE - MEMS gyroscope for use in inertia technology field. ADVANTAGE - The gyroscope is simple to manufacture and easy to operate, and has small thermal elastic damping and high sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a MEMS gyroscope manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a MEMS gyroscope.