▎ 摘 要
NOVELTY - Vacuum-encapsulated graphene resonant optical fiber pressure sensor comprises a graphene film (2) fixedly supported on a blind hole of an upper surface of a silicon film through a clamping piece (3). A glass sealing cover (4) and a pressure sensitive structure (1) are bonded to provide a vacuum environment for a graphene film (3). An inserting core (5) is connected and fixed with an optical fiber and the glass sealing cover. An optical fiber emitting light is irradiated to the graphene film through the glass sealing cover. The pressure sensitive structure is provided with a silicon pressure sensitive unit. USE - Used as vacuum-encapsulated graphene resonant optical fiber pressure sensor. ADVANTAGE - The sensor: is miniaturized in size, wide measuring range, good stability, high sensitivity, and anti-electromagnetic. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for manufacturing method of the vacuum-encapsulated graphene resonant optical fiber pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic structural diagram of the vacuum-encapsulated graphene resonant optical fiber pressure sensor. Pressure sensitive structure (1) Graphene film (2) Clamping piece (3) Glass sealing cover (4) Inserting core (5)