• 专利标题:   Vacuum-encapsulated graphene resonant optical fiber pressure sensor comprises graphene film fixedly supported on blind hole of upper surface of silicon film through clamping piece, and vacuum environment for graphene film.
  • 专利号:   CN112880887-A, CN112880887-B
  • 发明人:   LI C, LIU Y, FAN S
  • 专利权人:   UNIV BEIHANG
  • 国际专利分类:   G01L001/24
  • 专利详细信息:   CN112880887-A 01 Jun 2021 G01L-001/24 202150 Pages: 9 Chinese
  • 申请详细信息:   CN112880887-A CN10037623 12 Jan 2021
  • 优先权号:   CN10037623

▎ 摘  要

NOVELTY - Vacuum-encapsulated graphene resonant optical fiber pressure sensor comprises a graphene film (2) fixedly supported on a blind hole of an upper surface of a silicon film through a clamping piece (3). A glass sealing cover (4) and a pressure sensitive structure (1) are bonded to provide a vacuum environment for a graphene film (3). An inserting core (5) is connected and fixed with an optical fiber and the glass sealing cover. An optical fiber emitting light is irradiated to the graphene film through the glass sealing cover. The pressure sensitive structure is provided with a silicon pressure sensitive unit. USE - Used as vacuum-encapsulated graphene resonant optical fiber pressure sensor. ADVANTAGE - The sensor: is miniaturized in size, wide measuring range, good stability, high sensitivity, and anti-electromagnetic. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for manufacturing method of the vacuum-encapsulated graphene resonant optical fiber pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic structural diagram of the vacuum-encapsulated graphene resonant optical fiber pressure sensor. Pressure sensitive structure (1) Graphene film (2) Clamping piece (3) Glass sealing cover (4) Inserting core (5)