• 专利标题:   Growing patterned single-crystalline graphene comprises depositing a graphene growth barrier that defines a pattern on a substrate surface, and growing graphene on the substrate surface, around the graphene growth barrier.
  • 专利号:   WO2013028826-A2, WO2013028826-A3, US2013160701-A1, KR2014057620-A, KR1668691-B1, US9803292-B2
  • 发明人:   ARNOLD M S, GOPALAN P, SAFRON N S, KIM M
  • 专利权人:   WISCONSIN ALUMNI RES FOUND, ARNOLD M S, GOPALAN P, SAFRON N S, KIM M, ARNOLD M S, GOPALAN P, SAFRON N S, KIM M
  • 国际专利分类:   B82B003/00, C01B031/02, C01B031/04, C30B029/02, H01L021/02, C30B025/04, C30B025/00, B82Y030/00, B82Y040/00, H01L029/16
  • 专利详细信息:   WO2013028826-A2 28 Feb 2013 C01B-031/02 201319 Pages: 22 English
  • 申请详细信息:   WO2013028826-A2 WOUS051998 23 Aug 2012
  • 优先权号:   US527214P, US592564, KR707726

▎ 摘  要

NOVELTY - Growing patterned, single-crystalline graphene comprises: depositing a graphene growth barrier that defines a pattern on a substrate surface; and growing graphene on the substrate surface, around the graphene growth barrier. USE - The method is useful for growing patterned single-crystalline graphene that comprises: a single sheet of graphene or multiple sheets of graphene in a vertical stack; and at least 10 (preferably at least 1000) sheets of graphene (all claimed). ADVANTAGE - The method provides single-crystalline graphene: with edge roughness that is lower than the edge roughness of graphene patterned using top-down etching techniques; is more robust than graphene made with top-down etching techniques, where edge roughness and defects have the potential to initiate crack propagation and failure; and which can be grown over large areas (e.g. greater than or equal to 1 cm2).