• 专利标题:   Electronic apparatus i.e. FET, has ohmic electrodes provided on graphene layer, where gap between ohmic electrodes measured using Raman spectroscopy is larger than D band strength ratio with respect to G band in which carrier drives.
  • 专利号:   JP2017152644-A
  • 发明人:   YONEMURA T, OKADA M, NAGASAWA H, SUEMITSU M, FUKIDOME H, TATENO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, UNIV TOHOKU
  • 国际专利分类:   H01L021/28, H01L021/336, H01L029/786
  • 专利详细信息:   JP2017152644-A 31 Aug 2017 H01L-021/28 201761 Pages: 14 Japanese
  • 申请详细信息:   JP2017152644-A JP036123 26 Feb 2016
  • 优先权号:   JP036123

▎ 摘  要

NOVELTY - The apparatus has a graphene layer (12) arranged on a substrate (10) and provided with multiple atomic layers (48a, 48b) that are laminated together. Multiple ohmic electrodes (25) are provided on the graphene layer, where a D band strength ratio with respect to G band between the ohmic electrodes is measured using Raman spectroscopy in a first area (60) of the graphene layer such that gap between the ohmic electrodes measured using the Raman spectroscopy in a second area (62) of the graphene layer is larger than the D band strength ratio with respect to the G band in which a carrier drives. USE - Electronic apparatus i.e. FET. ADVANTAGE - The ohmic electrodes are provided on the graphene layer, where the gap between the ohmic electrodes measured using the Raman spectroscopy in the second area of the graphene layer is larger than the D band strength ratio with respect to the G band in which the carrier drives, so that contact resistance of the ohmic electrode and the graphene layer can be reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for manufacturing an electronic apparatus. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of an electronic apparatus. '(Drawing includes non-English language text)' Substrate (10) Graphene layer (12) Ohmic electrodes (25) Atomic layers (48a, 48b) Area's (60, 62)