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  • 专利标题:   Apparatus used for growing graphene, comprises quartz tube, ventilation cavity body, metal substrate and air cavity body, where air cavity body is columnar structure and metal substrate is provided with metal base.
  • 专利号:   CN104480451-A, CN104480451-B
  • 发明人:   GAO X, JIANG H, LI Z, SHI H, ZHANG Y, ZHU P, HUANG D
  • 专利权人:   CHONGQING MOXI TECHNOLOGY CO LTD, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHINESE ACAD SCI CHONGQING GREEN INTEL, CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN104480451-A 01 Apr 2015 C23C-016/26 201541 Pages: 7 Chinese
  • 申请详细信息:   CN104480451-A CN10766516 12 Dec 2014
  • 优先权号:   CN10766516

▎ 摘　　要

NOVELTY - Apparatus comprises quartz tube (5), ventilation cavity body (1), metal substrate (4) and air cavity body (1), where air cavity body is a columnar structure. The metal substrate is provided with a metal base. The inner end of the metal substrate is fixedly connected with the air cavity body that is set with an air inlet (3). The cavity body is provided with pneuma multi-hole (2). The quartz tube is sleeved in the air cavity body. USE - Apparatus used for growing graphene. ADVANTAGE - The apparatus is simple in structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an apparatus. Air cavity body (1) Ventilation cavity body (1) Pneuma multi-hole (2) Air inlet (3) Metal substrate (4) Quartz tube (5)