• 专利标题:   Manufacturing method of graphene-coated mold, involves forming mold by forming pattern on laminated dry film photoresist (DFR) or DFR/TRF film through exposure and development.
  • 专利号:   KR2022155047-A
  • 发明人:   MOON S I, KWON Y, WOOK Y B
  • 专利权人:   GRAPHENELAB CO LTD
  • 国际专利分类:   C23C014/04, H01L051/00, H01L051/56
  • 专利详细信息:   KR2022155047-A 22 Nov 2022 H01L-051/56 202201 Pages: 5
  • 申请详细信息:   KR2022155047-A KR062801 14 May 2021
  • 优先权号:   KR062801

▎ 摘  要

NOVELTY - Manufacture of mold involves synthesizing and coating graphene on a copper-foil substrate, laminating a dry film photoresist or dry film photoresist/thin film resistors film on both sides of the copper-foil substrate on which the graphene is synthesized, and forming a pattern on the laminated dry film photoresist or dry film photoresist/thin film resistors film through exposure and development. USE - Manufacture of mold e.g. graphene-coated mold used for manufacturing fine metal mask e.g. shadow mask (claimed) in manufacture of display devices such as organic light emitting diode. ADVANTAGE - The method enables to manufacture graphene-coated mold in a simple and cost-effective manner with high yield. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of a fine metal mask.