• 专利标题:   Method for transferring deposited graphene onto target substrate, involves depositing sample onto substrate, and removing frame by cutting through protective layer at inner border of frame or by thermal release.
  • 专利号:   EP3135631-A1, US2017057812-A1, US10192736-B2
  • 发明人:   ZURUTUZA ELORZA A, CENTENO PEREZ A, ZURUTUZA E M A, CENTENO P M A
  • 专利权人:   GRAPHENEA SA, GRAPHENEA SA
  • 国际专利分类:   B81C001/00, B32B037/00, B32B038/00, B32B038/10, C01B032/194, H01L021/02
  • 专利详细信息:   EP3135631-A1 01 Mar 2017 B81C-001/00 201717 Pages: 20 English
  • 申请详细信息:   EP3135631-A1 EP382430 24 Aug 2015
  • 优先权号:   EP382430

▎ 摘  要

NOVELTY - The method involves attaching a frame (5) comprising an outer border and an inner border to a protective layer (4), where the frame comprises a substrate and a thermal release adhesive polymer layer. A metal foil or metal thin film is removed or detached on a silicon substrate (1). Sample (21) is dried once the metal foil or metal thin film on the silicon substrate has been removed or detached. The sample is deposited onto the substrate. The frame is removed by cutting through the protective layer at the inner border of the frame or by thermal release. USE - Method for transferring graphene i.e. deposited graphene (claimed), onto a target substrate. ADVANTAGE - The method enables using copper foils with low cost, high flexibility and easy handling. The selected frame is stable, rigid, easy to handle, and avoids generation of substantial tension during etching or metal detaching stage. The method allows water soluble layers to dope the graphene material that is flexible, highly conductive and highly transparent characteristics needed for touch screen and display, lighting and solar cell applications. DETAILED DESCRIPTION - The frame is made of REVALPHA (RTM: thermal release tape). An INDEPENDENT CLAIM is also included for a device for transferring graphene onto a target substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a frame/protective layer/graphene layer/metal foil stack. Silicon substrate (1) Graphene (2) Protective layer (4) Frame (5) Sample (21)