• 专利标题:   Graphene oxide-based air flow sensor manufacturing method, involves fixing electrodes in graphene oxide film, and performing graphene oxidation reduction process to form reduced oxidation graphene film for manufacturing air flow sensor.
  • 专利号:   CN107966586-A
  • 发明人:   LI L, XU Z, WU K, ZHANG S
  • 专利权人:   CHINESE ACAD SCI SUZHOU NANOTECH NANO
  • 国际专利分类:   G01P005/08
  • 专利详细信息:   CN107966586-A 27 Apr 2018 G01P-005/08 201837 Pages: 10 Chinese
  • 申请详细信息:   CN107966586-A CN10915279 20 Oct 2016
  • 优先权号:   CN10915279

▎ 摘  要

NOVELTY - The method involves fixing multiple electrodes in a graphene oxide film. Graphene oxidation reduction process is performed to form a reduced oxidation graphene film for manufacturing an air flow sensor. The graphene oxide film is formed on a substrate through a physical adsorption and/or covalent bond way, where thickness of the graphene oxide film is 1 nm- 40 nm. The graphene oxide film is formed with a metal layer by performing thermal evaporation process. A silicon sheet is formed with a silicon dioxide layer. The silicon sheet is selected as the substrate. USE - Graphene oxide-based air flow sensor manufacturing method. ADVANTAGE - The method enables simplifying air flow sensor structure with high sensitivity, miniaturizing size of the air flow sensor, detecting weak air stream conditioned level and improving weak air stream processing convenience with low cost. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a graphene oxide-based flow sensor (2) an air flow testing system (3) an air flow testing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an air flow sensor.