• 专利标题:   Method for forming semiconductor structure, involves forming graphene layer on top surface of semiconductor layer, and forming black phosphor layer on top surface of graphene layer.
  • 专利号:   CN106711245-A, CN106711245-B
  • 发明人:   ZHANG H
  • 专利权人:   SEMICONDUCTOR MFG INT SHANGHAI CORP, SEMICONDUCTOR MFG INT BEIJING CORP
  • 国际专利分类:   H01L021/268, H01L031/0216, H01L031/0232, H01L031/18
  • 专利详细信息:   CN106711245-A 24 May 2017 H01L-031/0232 201740 Pages: 16 Chinese
  • 申请详细信息:   CN106711245-A CN10437373 23 Jul 2015
  • 优先权号:   CN10437373

▎ 摘  要

NOVELTY - The method involves providing a substrate (201). A semiconductor film is formed on the surface of the substrate. A graphene film is formed on the top surface of the semiconductor film. A black phosphor film is formed on a top surface of the graphene film. A patterned mask layer is formed on the top surface of the black phosphorus film. Multiple discrete semiconductor layers (213) are formed on the surface of the substrate. A graphene layer (215) is formed on the top surface of the semiconductor layer. A black phosphor layer (217) is formed on the top surface of the graphene layer. USE - Method for forming semiconductor structure. ADVANTAGE - The performance of the semiconductor structure is improved. The additional light absorption loss and light scattering loss is effectively avoided. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a semiconductor structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of a method for forming semiconductor structure. Substrate (201) Insulating layer (202) Discrete semiconductor layer (213) Graphene layer (215) Black phosphor layer (217)