• 专利标题:   Preparing graphene by relatively closed area solid-phase process, comprises successively or simultaneously depositing carbon source layer and catalytic metal layer on surface of clean substrate to obtain graphene preparation precursor, and heat annealing in oxygen-free or low-oxygen environment.
  • 专利号:   CN114171370-A
  • 发明人:   DUAN J, DENG L, LV T, WU H, ZHANG W, XIONG W
  • 专利权人:   UNIV HUAZHONG SCI TECHNOLOGY
  • 国际专利分类:   C23C014/04, C23C014/06, C23C014/18, C23C014/26, C23C014/30, C23C014/35, C23C014/58, H01L021/02
  • 专利详细信息:   CN114171370-A 11 Mar 2022 H01L-021/02 202235 Chinese
  • 申请详细信息:   CN114171370-A CN11363171 17 Nov 2021
  • 优先权号:   CN11363171

▎ 摘  要

NOVELTY - Preparing graphene by relatively closed area solid-phase process, comprises (1) successively or simultaneously depositing a carbon source layer and catalytic metal layer on surface of clean substrate to obtain graphene preparation precursor; and (2) upside down placing a graphene preparation precursor on loading table in annealing equipment, and heat annealing in oxygen-free or low-oxygen environment; or covering a surface of carbon source layer and/or catalytic metal layer of graphene preparation precursor with inert cover, placing it on loading table in annealing equipment, and heat-annealing in oxygen-free or low-oxygen environment; where described inversion is when graphene preparation precursor is placed on loading table of annealing equipment, its substrate is on top, and deposited carbon source layer and/or catalytic metal layer is on bottom; substrate, inert cover and loading table do not react with carbon source layer or catalytic metal layer during heat annealing process. USE - The graphene is useful in electronic device e.g. functional electronic device. ADVANTAGE - The method: prepared graphene has better quality, no metal residue, and wider range of carbon source selection.