• 专利标题:   High temperature graphene liquid metal spin coating method, involves adding dilute sample in growth medium by graphite layer, and fixing aluminum seed layer with graphene sample thin film layer by using atom layer deposition process.
  • 专利号:   CN103903973-A, CN103903973-B
  • 发明人:   SHEN Y, WEI H, YANG S, ZHOU P
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   H01L021/283
  • 专利详细信息:   CN103903973-A 02 Jul 2014 H01L-021/283 201460 Pages: 5 Chinese
  • 申请详细信息:   CN103903973-A CN10078021 05 Mar 2014
  • 优先权号:   CN10078021

▎ 摘  要

NOVELTY - The method involves adding dilute sample in a growth medium by a graphite layer, and forming metal aluminum thin film layer by using a graphene sample thin film layer. An aluminum seed layer is fixed with a graphene sample thin film layer by using an atom layer deposition process, where thickness of the aluminum seed layer is 2-3 nm. USE - High temperature graphene liquid metal spin coating method. ADVANTAGE - The method enables avoiding damage of a graphene lattice structure, realizing nano-scale operation of a plane device and processing graphite alkenyl mixing device based on basic processing technique in an effective manner. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a high temperature graphene liquid metal spin coating method.'(Drawing includes non-English language text)'