▎ 摘 要
NOVELTY - A vacuum ultraviolet ray is irradiated with respect to carbon group nanomaterial containing carbon nanotube-type material and/or graphene sheet-type material. A substance capable of modifying the surface of carbon nanomaterial in combination with ultraviolet ray is supplied, and carbon group nanomaterial having modified surface is manufactured. USE - Manufacture of surface-modified carbon nanomaterial used for electronic component, such as electroconductive sheet, wiring, heat radiation bump, electromagnetic wave shielding material sheet and prepreg used for electronic apparatus (all claimed). ADVANTAGE - The carbon nanomaterial exhibiting improved affinity during contact with other materials is efficiently surface-modified. DESCRIPTION OF DRAWING(S) - The drawing shows the main portion of apparatus for irradiating nanomaterial. Vacuum ultraviolet source (21) Gas (22) Cooling medium (25) Bundle of carbon nanotube (26) Substrate (27)