• 专利标题:   Force sensitive film integrated strip-type flexible linear array pressure sensor for use in intelligent fixture clamp of workpiece processing application, has semi-formal micro-porous film coated with micro-nitrogen conformal conductive layer and semi-structural piezoelectric tunneling layer.
  • 专利号:   CN113483922-A, CN113483922-B
  • 发明人:   WEI D, TAI G, XIE L, XU L, HU N, OU L, YANG J
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   G01L001/18
  • 专利详细信息:   CN113483922-A 08 Oct 2021 G01L-001/18 202189 Chinese
  • 申请详细信息:   CN113483922-A CN10560315 21 May 2021
  • 优先权号:   CN10560315

▎ 摘  要

NOVELTY - The sensor (1) has a flexible substrate provided with multiple pressure sensor linear array units. The flexible substrate is constructed with multiple micro-nano structures. The pressure sensor linear array unit is provided with an interdigital electrode integrated on a surface of the flexible substrate and coated with semi-conformal micro-nano force sensitive film. The semi-formal micro-porous film is coated with a micro-nitrogen conformal conductive layer and a semi-structural piezoelectric tunneling layer. The micro-nitrogen conformal conductive layer is covered on the surface of a micro-nano structure. The semi-structural piezoelectric tunneling layer is partially covered with the micro-nitrogen conformal conductive layer. A stress conducting contact is made of elastic material. The micro-nitrogen conformal conductive layer comprises graphene, graphene nano wall, carbon nano tube, carbon black, conductive polymer and metal. USE - Force sensitive film integrated strip-type flexible linear array pressure sensor for use in an intelligent fixture clamp (claimed) of a workpiece processing application. ADVANTAGE - The sensor enhance pressure-sensitive characteristic of the strip-type flexible linear array pressure sensor so as to avoid uneven surface thickness of the processed workpiece caused by uneven stress of a portion. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) an intelligent fixture clamp; (2) a force sensitive film manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a strip-type flexible linear array pressure sensor. (Drawing includes non-English language text). Strip type flexible linear array pressure sensor (1) Metal work fixture (4)