• 专利标题:   Manufacturing method of semiconductor device e.g. transistor, involves forming crystal film pattern on substrate and making graphene sheet grow from catalyst film pattern.
  • 专利号:   JP2009164432-A, JP5353009-B2
  • 发明人:   AWANO Y
  • 专利权人:   FUJITSU LTD, FUJITSU LTD
  • 国际专利分类:   H01L021/28, H01L021/336, H01L029/786
  • 专利详细信息:   JP2009164432-A 23 Jul 2009 H01L-029/786 200949 Pages: 12 Japanese
  • 申请详细信息:   JP2009164432-A JP001670 08 Jan 2008
  • 优先权号:   JP001670

▎ 摘  要

NOVELTY - A crystal film pattern (12) is formed on a substrate (11). A graphene sheet (13) is made to grow from the catalyst film pattern. The source and drain electrode portions (15,14) are formed in both ends of the graphene sheet. A gate electrode portion (16) is formed on the graphene sheet. USE - Manufacturing method of semiconductor device e.g. transistor. ADVANTAGE - The catalyst film pattern having a shape and a crystal pattern controlled for enabling formation of the graphene sheet in a desired place. The miniaturization and characteristic improvement are achieved by forming a graphene sheet having a desired shape and electrical conductivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for wiring structure. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional model diagram of the semiconductor device and the expanded planar model diagram of the channel portion.(Drawing includes non-English language text) Semiconductor device (10) Substrate (11) Catalyst film pattern (12) Graphene sheet (13) Drain electrode portion (14) Source electrode portion (15) Gate electrode portion (16)