• 专利标题:   Direct graphene transfer apparatus has transfer device for transferring graphene and metal catalyst to substrate, housing having interior space for filling etchant and holder for fixing catalyst, and rotation device.
  • 专利号:   KR2016100710-A, KR1665675-B1
  • 发明人:   JUN S C, LEE S C, NAM M S, OH J Y
  • 专利权人:   UNIV YONSEI IND ACADEMIC COOP FOUND
  • 国际专利分类:   C01B031/04, H01L021/02, H01L021/683, H01L029/16
  • 专利详细信息:   KR2016100710-A 24 Aug 2016 H01L-021/02 201670 Pages: 15
  • 申请详细信息:   KR2016100710-A KR023537 16 Feb 2015
  • 优先权号:   KR023537

▎ 摘  要

NOVELTY - A direct graphene transfer apparatus has a transfer device for transferring graphene and a metal catalyst to a substrate for proper growth without using support, a housing having an interior space for filling an etchant and a holder for fixing the metal catalyst to target substrate, and a rotation device coupled to housing and rotating the target substrate to transfer graphene with centrifugal force generated in the normal direction of substrate. USE - Direct graphene transfer apparatus (claimed). ADVANTAGE - The apparatus enables transfer of graphene reliably and directly. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for direct graphene transfer method.