• 专利标题:   Preparing a transferable perovskite oxide piezoelectric texture film involves selecting graphene as an intermediate layer material between the oxide and the substrate, and growing the film using pulsed laser deposition.
  • 专利号:   CN109023261-A
  • 发明人:   NIU G, DAI L, ZHAO J, REN W, WANG L, BAI W, SHI P
  • 专利权人:   UNIV XIAN JIAOTONG
  • 国际专利分类:   C23C014/08, C23C014/28
  • 专利详细信息:   CN109023261-A 18 Dec 2018 C23C-014/28 201915 Pages: 9 Chinese
  • 申请详细信息:   CN109023261-A CN10849978 28 Jul 2018
  • 优先权号:   CN10849978

▎ 摘  要

NOVELTY - Preparing a transferable perovskite oxide piezoelectric texture film involves selecting graphene as an intermediate layer material between the oxide and the substrate, growing the film using pulsed laser deposition. The growth temperature is from 500-800 degrees C. The partial pressure of oxygen is 10 Pa to 20 Pa. The laser energy is 1.5-3 J/cm2 and the frequency is 1 Hz to 10 Hz. USE - Method for preparing a transferable perovskite oxide piezoelectric texture film. ADVANTAGE - The method enables to prepare a transferable perovskite oxide piezoelectric texture film, which promotes crystallization of graphene, has good texture crystallization characteristics,film layer thickness is within 300 nm, surface of the film is flat and the root mean square roughness is within 1 nm, grown film has piezoelectricity and has the potential to be transferred to any substrate.