▎ 摘　　要

NOVELTY - A lower metal layer is formed and an insulating dielectric layer is deposited on the metal layer and etched to form through holes for inductor port. A diffusion barrier layer and metal seed layer are deposited on the through holes to obtain a metal induction coil. A graphene layer is grown on the surface of the coil to obtain metal inductor. USE - Manufacture of metal inductor for wireless communication application. ADVANTAGE - The metal inductor improves the electromigration resistance and lifetime of the coil, reduces performance degradation and overall copper interconnection due to electromigration phenomenon, has excellent thermal conductivity, and eases the inductance coil local temperature fusing or dielectric breakdown phenomenon.