• 专利标题:   Preparation of flexible conductive film involves processing silicon substrate using argon, hydrogen and methane gases, rapidly cooling, etching using etching agent, and transfer-printing obtained graphene oxide film on flexible substrate.
  • 专利号:   CN102496421-A
  • 发明人:   LAN W, LI Y, SU Q, XIE E, ZHU C
  • 专利权人:   UNIV LANZHOU
  • 国际专利分类:   H01B013/00, H01L021/02
  • 专利详细信息:   CN102496421-A 13 Jun 2012 H01B-013/00 201257 Pages: 10 Chinese
  • 申请详细信息:   CN102496421-A CN10412040 12 Dec 2011
  • 优先权号:   CN10412040

▎ 摘  要

NOVELTY - Silica layer and physical vapor deposition catalyst film are sequentially formed on silicon substrate, substrate is placed in chemical vapor deposition (CVD) device, argon and hydrogen gases are introduced, CVD device is heated, methane gas is passed, left, supply of methane is closed, and CVD device is rapidly cooled. Obtained graphene film sample is placed in etching agent, a portion of film is etched, and then, obtained graphene oxide film is transfer-printed on flexible substrate from the silicon substrate. Thus, preparation of flexible conductive film is carried out. USE - Preparation of flexible conductive film. ADVANTAGE - The method provides flexible conductive film having favorable conductivity, foldability and bendability and damage resistance under high temperature environment. DETAILED DESCRIPTION - A silica layer and a physical vapor deposition catalyst film are sequentially formed on silicon substrate, the substrate is placed in chemical vapor deposition (CVD) device, argon and hydrogen gases are introduced with high flow rate, at same time the CVD device is heated at 800-1100 degrees C, then methane gas is passed, left, supply of methane is closed, and the CVD device is rapidly cooled to room temperature, to obtain graphene film sample. The obtained graphene film sample is placed in etching agent, a portion of film is etched, and then, obtained graphene oxide film is transfer-printed on flexible substrate from the silicon substrate, by transfer printing process. Thus, preparation of flexible conductive film is carried out.