• 专利标题:   Method for growing self-organized epitaxial gallium nitride material on graphene, involves growing metastatic graphene film on substrate, annealing substrate, forming self-organized nucleation sites and growing nucleating layer.
  • 专利号:   CN105914139-A, CN105914139-B
  • 发明人:   FANG Y, FENG Z, GUO Y, LI J, YIN J, WANG B, LU W
  • 专利权人:   13TH RES INST CHINA ELECTRONIC SCI TEC, 13TH RES INST CHINA ELECTRONIC SCI TEC
  • 国际专利分类:   H01L021/02
  • 专利详细信息:   CN105914139-A 31 Aug 2016 H01L-021/02 201671 Pages: 7 Chinese
  • 申请详细信息:   CN105914139-A CN10483196 28 Jun 2016
  • 优先权号:   CN10483196

▎ 摘  要

NOVELTY - A self-organized epitaxial gallium nitride material on graphene growing method involves growing metastatic graphene film on substrate. The substrate is annealed in metalorganic chemical vapor deposition (MOCVD) reaction chamber with MOCVD technology and self-organized nucleation sites are formed in the graphene film. Nucleating layer is grown and annealed to achieve crystallization of nucleation layer. Self-organized epitaxial gallium nitride material is grown after change in temperature. USE - Method for growing self-organized epitaxial gallium nitride material on graphene. ADVANTAGE - The method enables growing the self-organized epitaxial gallium nitride material on graphene with improved graphene nucleation sites, facilitating formation of nucleation layer of graphene and increasing crystal quality of gallium nitride material, efficiency and service life.