• 专利标题:   Preparation of graphene film involves providing vacuum chamber, conveying graphene foil tape in vacuum chamber through conveying mechanism, heating graphene foil tape, feeding process gas, and setting power supply assembly.
  • 专利号:   CN107217240-A
  • 发明人:   LI L, PU H, ZHOU Z
  • 专利权人:   JIANGSU XINGTELIANG TECHNOLOGY CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44, C23C016/54
  • 专利详细信息:   CN107217240-A 29 Sep 2017 C23C-016/26 201771 Pages: 6 Chinese
  • 申请详细信息:   CN107217240-A CN10561586 11 Jul 2017
  • 优先权号:   CN10561586

▎ 摘  要

NOVELTY - Preparation of graphene film involves providing vacuum chamber; conveying graphene foil tape in vacuum chamber through conveying mechanism; heating graphene foil tape between first and second transfer members; feeding process gas through gas delivery mechanism provided in vacuum chamber; and setting power supply assembly such that first transfer assembly is electrically connected to positive or negative electrode of power supply assembly and causing second transfer member to conduct with negative or positive electrode of power supply assembly. USE - Preparation of graphene film. ADVANTAGE - The method solves problem of existing method including slow growth of graphene film, non-uniform film formation, and wasted process gas. DETAILED DESCRIPTION - Preparation of graphene film comprises providing vacuum chamber; conveying graphene foil tape in vacuum chamber through conveying mechanism, which includes first transfer member provided at start end of graphene foil tape and second transfer member provided on foil transfer end, and both of first transfer member and second transfer member are electrically conductive; heating graphene foil tape between first and second transfer members; feeding process gas through gas delivery mechanism provided in vacuum chamber; setting power supply assembly such that first transfer assembly is electrically connected to positive or negative electrode of power supply assembly and causing second transfer member to conduct with negative or positive electrode of power supply assembly; and opening transfer mechanism, heating mechanism, gas delivery mechanism, power supply assembly such that graphene foil tape is grown in vacuum chamber to form graphene film.