• 专利标题:   Preparation of graphene involves adding substrate and solid activated carbon to plasma-enhanced chemical vapor deposition apparatus, heating, passing gas, opening plasma generator, growing graphene, and cooling to room temperature.
  • 专利号:   CN105274500-A
  • 发明人:   CAI Z, CAO M, LI K, LI M, LIU D, QI G, WEI D, XIA D
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   C23C016/26, C23C016/513
  • 专利详细信息:   CN105274500-A 27 Jan 2016 C23C-016/513 201619 Pages: 8 English
  • 申请详细信息:   CN105274500-A CN10698730 24 Oct 2015
  • 优先权号:   CN10698730

▎ 摘  要

NOVELTY - Preparation of graphene involves adding substrate and solid activated carbon to plasma-enhanced chemical vapor deposition apparatus having different temperature zones, heating substrate and solid activated carbon in corresponding temperature zone, passing a gas, opening plasma generator, growing graphene, stopping heating, continuing passing of gas, rapidly cooling to room temperature, and uniformly growing graphene on substrate surface. USE - Preparation of graphene by plasma-enhanced chemical vapor deposition (claimed). ADVANTAGE - The method enables economical preparation of graphene by plasma-enhanced chemical vapor deposition by growing graphene at low temperature. The graphene is high-quality single or multi-layered graphene.