• 专利标题:   Fabrication method of graphene-based electronic nanoconstriction device, involves forming top-gate dielectric layer over graphene layer, and forming top-gate electrode over graphene channel.
  • 专利号:   US2013330885-A1, US8623717-B2
  • 发明人:   CHEN C, HAN S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y040/00, H01L021/336, H01L021/00, H01L021/84
  • 专利详细信息:   US2013330885-A1 12 Dec 2013 H01L-021/336 201401 Pages: 11 English
  • 申请详细信息:   US2013330885-A1 US494635 12 Jun 2012
  • 优先权号:   US494635

▎ 摘  要

NOVELTY - The fabrication method involves forming back-gate (610) dielectric layer over a conductive substrate, forming graphene layer over the back-gate dielectric layer, and forming contacts over a portion of the graphene layer including source contact. The drain contact and side-gate contact are formed in graphene layer between source contact. A top-gate (650) dielectric layer is formed over graphene layer, while top-gate electrode is formed over the graphene channel. USE - Fabrication method of graphene-based electronic nanoconstriction device. ADVANTAGE - Provides immunity to impurities induced by edge defects since the graphene channel geometry is easy to fabricate. DESCRIPTION OF DRAWING(S) - The drawing shows the schematic band diagram of the device. Graphene nanoconstriction device (600) Back gate (610) Graphene side gates (627,628) Channels (634,636) Top gate (650)