▎ 摘　　要

NOVELTY - High-precision tunnel accelerometer comprises glass substrates, silicon chip and graphene. The glass substrate and silicon are connected by anodic bonding. The silicon chip is provided with feedback electrodes, mass blocks and tunnel junctions. The feedback electrode is on left side of mass block. The mass block is fixedly connected with spring. The tunnel junction is located on right side of mass block. Nano-scale tunnel gaps are formed by electro-combustion of graphene. USE - Used as high-precision tunnel accelerometer. ADVANTAGE - The accelerometer utilizes the graphene electro-combustion method to prepare the tunnel junction, which not only avoids the limitation of the traditional process, but also ensures the controllability of the tunnel spacing, thus improving the test accuracy of the accelerometer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for preparation of high-precision tunnel accelerometer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the high-precision tunnel accelerometer.