• 专利标题:   Electronic apparatus e.g. transistor, has protective film consisting of transition metal oxide that is formed on graphene film which is formed on insulating substrate, and insulating layer formed on protective film with electrode.
  • 专利号:   WO2013168645-A1, JP2013236017-A, TW201409703-A, US2015123080-A1, JP5910294-B2, TW527231-B1, US2017229583-A1, US9966472-B2
  • 发明人:   YAMAGUCHI J
  • 专利权人:   NAT INST ADVANCED IND SCI TECHNOLOGY, DOKURITSU GYOSEI HOJIN SANGYO GIJUTSU SO, NAT INST ADVANCED IND SCI TECHNOLOGY, FUJITSU LTD, FUJITSU LTD, FUJITSU LTD
  • 国际专利分类:   H01L021/336, H01L029/06, H01L029/786, H01L051/05, H01L051/30, C01B031/02, H01L021/28, H01L029/78, H01L021/02, H01L029/16, H01L029/51, H01L021/78
  • 专利详细信息:   WO2013168645-A1 14 Nov 2013 H01L-029/786 201378 Pages: 23 Japanese
  • 申请详细信息:   WO2013168645-A1 WOJP062657 30 Apr 2013
  • 优先权号:   JP108730

▎ 摘  要

NOVELTY - The electronic apparatus has graphene film formed on the insulating substrate(17), and protective film (14) consisting of the transition metal oxide that is formed on graphene film. An insulating layer is formed on the protective film, and an electrode is formed on the insulating layer. USE - Electronic apparatus e.g. transistor. ADVANTAGE - The polymeric materials, such as resist are not in contact with graphene directly at the time of transfer of graphene, such that the laminated structure by which the outlying carrier doping to the graphene by the polymeric residue of resist can be suppressed. The improvement and operational stability of an electrical property can be achieved and a reliable electronic apparatus can be obtained. The thin film formation of the gate insulating layer of high-k material is enabled. The improvement of the control efficiency of the carrier concentration of a graphene film and low-voltage operation can be achieved. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a manufacturing method of laminated structure of electronic apparatus; and (2) a laminated structure. DESCRIPTION OF DRAWING(S) - The drawings show the sectional views illustrating the process for manufacturing laminated structure of electronic apparatus. (Drawing includes non-English language text) Substrate (11) Graphene layer (13) Protective film (14) Contact layer (15) Support layer (16) Insulating substrate (17)