• 专利标题:   Vertical thin film transistor (VTFT) has second electrode that is disposed on channel layer, and first electrode which is arranged on insulating layer and is comprised of two-dimensional material.
  • 专利号:   KR2436874-B1
  • 发明人:   EUN J, PYO G E, KIM D S, CHAE J W, CHOI K H
  • 专利权人:   DAEGU GYEONGBUK INST SCI TECHNOLOGY
  • 国际专利分类:   H01L029/417, H01L029/49, H01L029/51, H01L029/786
  • 专利详细信息:   KR2436874-B1 25 Aug 2022 H01L-029/786 202273 Pages: 10
  • 申请详细信息:   KR2436874-B1 KR077989 16 Jun 2021
  • 优先权号:   KR077989

▎ 摘  要

NOVELTY - The VTFT (10) has a gate electrode (110). An insulating layer (120) is arranged on the gate electrode. A first electrode (130) is arranged on the insulating layer and including a hole. A channel layer (140) is arranged on the first electrode. A second electrode (150) is arranged on the channel layer. The first electrode comprises a two-dimensional material which is graphene (Graphene), black phosphorous (Black phosphorous), reduced graphene oxide (rGO), B3 H, B3 F, B3 Cl, Borophene, transition metal dichalcogenides (TMDC), silicene, germanene, stanene, hexagonal boron nitride, (h-BN) and a VTFT. USE - Vertical thin film transistor (VTFT). ADVANTAGE - The transistor induces a low off-current state through gate field penetration and change in Fermi level of the two-dimensional material by the gate field, so that turning on-off ratio can be greatly improved. The 2D material can control the 2D level, and electrical properties can be improved in a hole region and an electrode region. The transistor can be implemented in different applications, and is patterned at a time by photolithography so as to simplify manufacturing process of the transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a vertical thin film transistor. 10VTFT 110Gate electrode 120Insulating layer 130First electrode 140Channel layer 150Second electrode