▎ 摘　　要

NOVELTY - One for a kind of graphene film in the CVD monitoring system, comprising, vacuum pump, flow meter, vacuum meter, temperature sensor, control rod, and feedstock material transport system, a PLC control cabinet, data wire and signal wire, controller, flow meter, temperature sensor and heating furnace connected with the vacuum pump, vacuum meter and feedstock chamber, heating furnace and discharging chamber connected, used for respectively and vacuumize the vacuum degree measurement, feedstock and discharging system respectively send the feedstock chamber and discharging chamber, the material sending operation and control rod used for feedstock material transport system and PLC control cabinet through data wire and signal wire and temperature controller, vacuum pump, flow meter, vacuum meter, temperature sensor, control stick in, feedstock chamber and discharging chamber cylinder cover, feedstock chamber, discharging chamber and heating furnace baffle plate valve and connected with processing control. This new utility model can online monitor and store key process parameter and real time waveform and data, automatic degree high, reliability and high stability, strong anti-interference ability strong.