• 专利标题:   Photolithographically patternable composition, comprises graphene, natural protein and solvent.
  • 专利号:   CN110673440-A
  • 发明人:   DUAN X, JIN F, ZHENG M, DONG X
  • 专利权人:   TECH INST PHYSICS CHEM CHINESE ACAD
  • 国际专利分类:   G03F007/004
  • 专利详细信息:   CN110673440-A 10 Jan 2020 G03F-007/004 202008 Pages: 15 Chinese
  • 申请详细信息:   CN110673440-A CN10968018 12 Oct 2019
  • 优先权号:   CN10968018

▎ 摘  要

NOVELTY - A photolithographically patternable composition comprises a graphene, a natural protein and a solvent. USE - Photolithographically patternable composition. ADVANTAGE - The photolithographically patternable composition has high sensitivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for preparing composition, which involves mixing a graphene, a natural protein and a solvent to obtain the finished product (2) a photolithographic patterning method, is performed by mixing a graphene, a natural protein, and a solvent uniformly to obtain the composition, applying the composition to a substrate to obtain a substrate having a film formed from the composition on the surface, forming a light source is used to expose and develop the film by utilizing the composition or utilizing laser direct writing and development to obtain the finished product.