• 专利标题:   Preparation of multilayered single crystal graphene involves carrying out electrochemical polishing of copper substrate, washing, drying, placing in reaction chamber, evacuating, filling hydrogen, heating, filling methane, and heating.
  • 专利号:   CN103556217-A
  • 发明人:   SHI Y, HAO Y, WANG D, ZHANG J, CHAI Z, HAN D, YAN Y
  • 专利权人:   UNIV XIDIAN
  • 国际专利分类:   C30B025/00, C30B029/02
  • 专利详细信息:   CN103556217-A 05 Feb 2014 C30B-025/00 201424 Chinese
  • 申请详细信息:   CN103556217-A CN10449307 27 Sep 2013
  • 优先权号:   CN10449307

▎ 摘  要

NOVELTY - Preparation of multilayered single crystal graphene involves carrying out electrochemical polishing of copper substrate for 1-5 minutes, washing, drying with high purity nitrogen, placing the treated substrate in reaction chamber of chemical vapor deposition apparatus, evacuating, removing residual gas, filling high purity hydrogen, heating at 150-300 degrees C for 10-30 minutes, evacuating, removing the substrate, further heating at 900-1075 degrees C, filling methane in chamber, processing at 900-1075 degrees C for 5-300 minutes, cooling, and growing 1-5 layers of graphene. USE - Preparation of multilayered single crystal graphene (claimed). ADVANTAGE - The single crystal graphene having high quality is prepared. DETAILED DESCRIPTION - Preparation of multilayered single crystal graphene involves carrying out electrochemical polishing of copper substrate for 1-5 minutes, washing with deionized water and ethanol, drying with high purity nitrogen, placing the treated substrate in reaction chamber of chemical vapor deposition apparatus, evacuating at 101 to 104 Pa, removing residual gas, filling high purity hydrogen, heating at 150-300 degrees C and 1 Pa to 103 Pa for 10-30 minutes, evacuating, removing the substrate, further heating at 900-1075 degrees C and 1 Pa to 103 Pa, filling methane in chamber, processing at 900-1075 degrees C for 5-300 minutes, naturally cooling, growing 1-5 layers of graphene, reducing temperature to less than 100 degrees C, filling argon gas, and removing sample.