• 专利标题:   Vertical tube furnace useful for growing graphene comprises a furnace body, the furnace body is provided with process cabin, a transition chamber is disposed above or below the furnace body.
  • 专利号:   CN109956467-A
  • 发明人:   SHEN D, TAN P, LIU H, TAN H
  • 专利权人:   WUXI GRAPHENE FILM CO LTD, WUXI SIXTH ELEMENT ELECTRONIC THIN FILM
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN109956467-A 02 Jul 2019 C01B-032/186 201973 Pages: 11 Chinese
  • 申请详细信息:   CN109956467-A CN11408019 22 Dec 2017
  • 优先权号:   CN11408019

▎ 摘  要

NOVELTY - Vertical tube furnace comprises a furnace body, the furnace body is provided with process cabin, a transition chamber is disposed above or below the furnace body, the transition chamber being configured to be in communication with process chamber and capable of being turned off, a pylon disposed in the process chamber for placing a growth substrate and moving the device to move the pylon back and forth between the process chamber and the transition chamber. USE - The furnace is useful for growing graphene (claimed). ADVANTAGE - The furnace improves film quality of the graphene. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic representation of the vertical tube furnace