▎ 摘　　要

NOVELTY - Method for manufacturing a graphene-metal composite pellicle containing graphene involves forming a metal catalyst layer on a silicon substrate, forming a core layer by growing graphene on the metal catalyst layer, forming a first protective layer on the core layer, forming a heat dissipation layer on the first protective layer and forming a pellicle frame composed of a silicon substrate-metal catalyst layer by etching from the silicon substrate side to the metal catalyst layer to expose the core layer. USE - The method is useful for manufacturing a graphene-metal composite pellicle containing graphene. ADVANTAGE - The method provides the product with thermal load stability, high extreme UV transmittance, excellent chemical durability, mechanical properties and high reliability, forms a protective layer in the exposed region of the silicon substrate and removes the metal catalyst layer by an etching process and prevents the pellicle core part from being separated from the pellicle frame part. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the graphene-metal composite pellicle containing graphene prepared by the method.